RFQ - Profilometer for sputter crater depth measurement
National Physical Laboratory
 
NPL requires a stylus profilometer to measure the sputter crater depth for X-ray Photoelectron spectroscopy and secondary ion mass spectrometry metrology work. Sputter craters are typically in the range of (1000 µm x 1000 µm) to (100 µm x 100 µm) and with depths from 10 µm to 100 nm...